%PDF-1.4
%
1 0 obj
<<
/Nums [0 2 0 R]
>>
endobj
2 0 obj
<<
/S /D
>>
endobj
3 0 obj
<<
/Kids [4 0 R]
/Type /Pages
/Count 1
>>
endobj
5 0 obj
<<
/Subtype /XML
/Type /Metadata
/Length 3684
>>
stream
Acrobat Distiller 8.1.0 (Windows)
PScript5.dll Version 5.2.2
2014-05-12T12:04:47+02:00
2014-05-12T12:04:47+02:00
application/pdf
R:\allgemein\Technik & Dokumentation\Zeichnungen\Zeichnungen NANOTEC\ACAD-Zeichnungen\ST5909\ST5909L2008-A Layout1 (1)
du_j
uuid:88d64136-9294-4d39-93e6-db345f24b4f6
uuid:bde54e22-4a30-4939-988d-a2f8effb3270
endstream
endobj
6 0 obj
<<
/Metadata 5 0 R
/PageLabels 1 0 R
/Type /Catalog
/Pages 3 0 R
>>
endobj
4 0 obj
<<
/Resources 7 0 R
/Rotate 90
/Type /Page
/Contents [8 0 R 9 0 R 10 0 R 11 0 R 12 0 R 13 0 R 14 0 R 15 0 R]
/Parent 3 0 R
/MediaBox [0 0 595.22 842]
/CropBox [0 0 595.22 842]
>>
endobj
7 0 obj
<<
/ProcSet [/PDF]
/ExtGState
<<
/GS1 16 0 R
>>
>>
endobj
8 0 obj
<<
/Filter /FlateDecode
/Length 15978
>>
stream
HWˮ$GW|?4K-X,䕱q'"#8#ztx_M~Yf~:BBOgR
W0k^Y^[t~ގB.)o^ov6җ?UT9CoQa+lNC`<~ߜ:ۂg'lo<㇛
6fޭH#3gEQzƓ_vh]^%=%| r >rHcaBF?'!May+"܊8na#67[}0+:᭡~L`oXFgJl;٪n/B(nk8NԾ3$wSX;\4*CD%ȁhAy")OSװe#ԩ/ߊ9 4gxnQgzLοlB#pUMoQsWa~pE%2D!'Yp
WQs5UX\DCͧh]2IHczJcE˓
E_[nj"S#ШS=yQ{^ƜnɄh!}}CnRQ/uDmb&H|H@4nڊTik*48HL1X5!uEPЪ
}NKf<%j[@qY X9娖K@+PVS9!o@}ٺ Y8ަr^V;)Ens4IaT ;\Kr .(Z4V.)Y`E^J"g
v9μ &
$#˘ȦEoa
Ld]
%8N
\nqv9-_B/3tqtEuTF4Fԙ`yw/SOTŽ+NIS]DYOrsRlaYJtk<
_
cZ|ṕv\ײ_ǐ\1QԜDq#nC)EzuB/ZvwA{fd|T}dՆunTBuukf\bV*oҺf -PԲ<?W
+Дl.?<4<8yjz_[z5h8mpl.,ZvmVlIɱ_m&